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1 Publikation
2001 | Artikel | FH-PUB-ID: 3546
@article{Hamelmann_Aschentrup_Schmalhorst_Kleineberg_Heinzmann_Dittmar_Jutzi_2001, title={Silicon oxide nanolayers for soft X-ray optics produced by plasma enhanced CVD}, volume={11}, DOI={10.1051/jp4:2001354}, number={3}, journal={Le Journal de Physique IV}, publisher={EDP Sciences}, author={Hamelmann, Frank and Aschentrup, A. and Schmalhorst, J. and Kleineberg, U. and Heinzmann, U. and Dittmar, K. and Jutzi, P.}, year={2001}, pages={431–436} }
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