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1 Publikation
2001 | Artikel | FH-PUB-ID: 3546
Hamelmann F, Aschentrup A, Schmalhorst J, et al. Silicon oxide nanolayers for soft X-ray optics produced by plasma enhanced CVD. Le Journal de Physique IV. 2001;11(3):431-436. doi:10.1051/jp4:2001354
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