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1 Publikation
2001 | Artikel | FH-PUB-ID: 3546
Hamelmann, Frank ; Aschentrup, A. ; Schmalhorst, J. ; Kleineberg, U. ; Heinzmann, U. ; Dittmar, K. ; Jutzi, P.: Silicon oxide nanolayers for soft X-ray optics produced by plasma enhanced CVD. In: Le Journal de Physique IV Bd. 11, EDP Sciences (2001), Nr. 3, S. 431–436
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