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1 Publikation
2001 | Artikel | FH-PUB-ID: 3546
Silicon oxide nanolayers for soft X-ray optics produced by plasma enhanced CVD
F. Hamelmann, A. Aschentrup, J. Schmalhorst, U. Kleineberg, U. Heinzmann, K. Dittmar, P. Jutzi, Le Journal de Physique IV 11 (2001) 431–436.
HSBI-PUB
| DOI
F. Hamelmann, A. Aschentrup, J. Schmalhorst, U. Kleineberg, U. Heinzmann, K. Dittmar, P. Jutzi, Le Journal de Physique IV 11 (2001) 431–436.