Thermal stability of multilayer reflective coatings under high intensity excimer laser pulses
E. D’Anna, A. Luches, M. Martino, M. Brunel, E. Majkova, S. Luby, R. Senderak, M. Jergel, F. Hamelmann, U. Kleineberg, U. Heinzmann, Applied Surface Science 106 (1996) 166–170.
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Artikel
| Veröffentlicht
| Englisch
Autor*in
D'Anna, E.;
Luches, A.;
Martino, M.;
Brunel, M.;
Majkova, E.;
Luby, S.;
Senderak, R.;
Jergel, M.;
Hamelmann, Frank
;
Kleineberg, U.;
Heinzmann, U.
;
Kleineberg, U.;
Heinzmann, U.Erscheinungsjahr
Zeitschriftentitel
Applied Surface Science
Band
106
Seite
166-170
ISSN
FH-PUB-ID
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D’Anna, E. ; Luches, A. ; Martino, M. ; Brunel, M. ; Majkova, E. ; Luby, S. ; Senderak, R. ; Jergel, M. ; u. a.: Thermal stability of multilayer reflective coatings under high intensity excimer laser pulses. In: Applied Surface Science Bd. 106, Elsevier BV (1996), S. 166–170
D’Anna E, Luches A, Martino M, et al. Thermal stability of multilayer reflective coatings under high intensity excimer laser pulses. Applied Surface Science. 1996;106:166-170. doi:10.1016/S0169-4332(96)00365-0
D’Anna, E., Luches, A., Martino, M., Brunel, M., Majkova, E., Luby, S., … Heinzmann, U. (1996). Thermal stability of multilayer reflective coatings under high intensity excimer laser pulses. Applied Surface Science, 106, 166–170. https://doi.org/10.1016/S0169-4332(96)00365-0
@article{D’Anna_Luches_Martino_Brunel_Majkova_Luby_Senderak_Jergel_Hamelmann_Kleineberg_et al._1996, title={Thermal stability of multilayer reflective coatings under high intensity excimer laser pulses}, volume={106}, DOI={10.1016/S0169-4332(96)00365-0}, journal={Applied Surface Science}, publisher={Elsevier BV}, author={D’Anna, E. and Luches, A. and Martino, M. and Brunel, M. and Majkova, E. and Luby, S. and Senderak, R. and Jergel, M. and Hamelmann, Frank and Kleineberg, U. and et al.}, year={1996}, pages={166–170} }
D’Anna, E., A. Luches, M. Martino, M. Brunel, E. Majkova, S. Luby, R. Senderak, et al. “Thermal Stability of Multilayer Reflective Coatings under High Intensity Excimer Laser Pulses.” Applied Surface Science 106 (1996): 166–70. https://doi.org/10.1016/S0169-4332(96)00365-0.
E. D’Anna et al., “Thermal stability of multilayer reflective coatings under high intensity excimer laser pulses,” Applied Surface Science, vol. 106, pp. 166–170, 1996.
D’Anna, E., et al. “Thermal Stability of Multilayer Reflective Coatings under High Intensity Excimer Laser Pulses.” Applied Surface Science, vol. 106, Elsevier BV, 1996, pp. 166–70, doi:10.1016/S0169-4332(96)00365-0.
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